JPH01307284A - 放電電極 - Google Patents

放電電極

Info

Publication number
JPH01307284A
JPH01307284A JP13750788A JP13750788A JPH01307284A JP H01307284 A JPH01307284 A JP H01307284A JP 13750788 A JP13750788 A JP 13750788A JP 13750788 A JP13750788 A JP 13750788A JP H01307284 A JPH01307284 A JP H01307284A
Authority
JP
Japan
Prior art keywords
electrode
auxiliary electrode
dielectric
discharge
feed section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13750788A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0583200B2 (en]
Inventor
Takeo Haruta
春田　健雄
Mitsuo Inoue
満夫 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP13750788A priority Critical patent/JPH01307284A/ja
Publication of JPH01307284A publication Critical patent/JPH01307284A/ja
Publication of JPH0583200B2 publication Critical patent/JPH0583200B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP13750788A 1988-06-06 1988-06-06 放電電極 Granted JPH01307284A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13750788A JPH01307284A (ja) 1988-06-06 1988-06-06 放電電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13750788A JPH01307284A (ja) 1988-06-06 1988-06-06 放電電極

Publications (2)

Publication Number Publication Date
JPH01307284A true JPH01307284A (ja) 1989-12-12
JPH0583200B2 JPH0583200B2 (en]) 1993-11-25

Family

ID=15200284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13750788A Granted JPH01307284A (ja) 1988-06-06 1988-06-06 放電電極

Country Status (1)

Country Link
JP (1) JPH01307284A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991014302A1 (fr) * 1990-03-05 1991-09-19 Mitsui Petrochemical Industries, Ltd. Laser a halogenure de gaz rare a excitation par decharge

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5810872A (ja) * 1981-07-14 1983-01-21 Toshiba Corp 太陽電池の製造方法
JPS6191983A (ja) * 1984-10-11 1986-05-10 Mitsubishi Electric Corp 放電励起短パルスレ−ザ装置
JPS6231186A (ja) * 1985-08-02 1987-02-10 Mitsubishi Electric Corp パルスレ−ザ発振器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5810872A (ja) * 1981-07-14 1983-01-21 Toshiba Corp 太陽電池の製造方法
JPS6191983A (ja) * 1984-10-11 1986-05-10 Mitsubishi Electric Corp 放電励起短パルスレ−ザ装置
JPS6231186A (ja) * 1985-08-02 1987-02-10 Mitsubishi Electric Corp パルスレ−ザ発振器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991014302A1 (fr) * 1990-03-05 1991-09-19 Mitsui Petrochemical Industries, Ltd. Laser a halogenure de gaz rare a excitation par decharge
US5251226A (en) * 1990-03-05 1993-10-05 Mitsui Petrochemical Industries, Ltd. Discharge exciting excimer laser device

Also Published As

Publication number Publication date
JPH0583200B2 (en]) 1993-11-25

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term